MEMS Fabrication

Custom solutions.

In Microsystems, one size does not fit all. That's why ITC develops complete solutions on a project-by-project basis. To ensure we meet your exact requirements, we offer a wide variety of process flows. Our experience includes surface and bulk micromachining process flows on materials such as Single Crystal Silicon on Insulator (SOI), silicon, glass, quartz, and more.

Our extensive MEMS fabrication capabilities also include: Photolithography, Etch, CVD, PVD, CMP/Grind.

Device Technologies:

Optical
Single Crystal Si Micromirrors
Si Waveguides
Dielectric Gratings and Filters
Gratings
RF
Resonators
Tunable Capacitors
Microfluidic
Microchannel & Mixers Microvalves & Pumps
Filters
Micronozzles
Mechanical
Comb Drives
Cantilevers & Membranes
Flip-up Structures

For a complete list of MEMS Fabrication capabilities or to set up a consultation, contact us at 585.919.3000 or .