MEMS Fabrication

Physical Vapor Deposition (PVD)

Programming the Leybold 1104 APS

Programming the Leybold 1104 APS

Processes & Equipment:

  • E-beam Metals Evaporation - Temescal:
    • Materials: Cr, Au, Al, Ni, Sn, Ti, Pt, Mo
    • Dome (Lift-off), Planetary (Conformal), Specialty Fixturing
  • Evaporated Optical Coatings - Leybold 1104 APS:
    • Materials: HfO2, TiO2, SiO2, ITO, Ta2O5
    • Ion assisted deposition available
  • Sputter - Veeco Connexion Cluster:
    • Materials: Al/Si, Al/Nd, AIN, ITO, Ta, Mo, Al, Ti, Ti/W, AlSiCu, ArT, Ar2O3
    • 2 DC Chambers, 1 RF, Heated, Biased, Reactive Depositions

For a complete list of PV Deposition capabilities or to set up a consultation, contact us at 585.919.3000 or .