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Publications

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Publications Archive

Presentations

• Molecular Vapor Deposition Integration with MEMS Manufacturing
  (3.4 MB • PDF)
• Injection Characterization of Packaged Bi-Directional Diamond-Shaped Ring Lasers at 1550 nm
  (746 KB • PDF)

Publications

• Optical MEMS platform for Low Cost On-Chip Integration of Planar Light Circuits and Optical Switching
  (1.4 MB • PDF)
• Hybrid Silicon-On-Insulator Micromachining Process - 8 Mask Version Design Guide
  (1.6 MB • PDF)
• Multi-User Hybrid Process Platform for MEMS Devices Using Silicon-On-Insulator Wafers
  (304 KB • PDF)
• Hybrid integration of Light Emitters and Detectors with SOI Based Micro-Opto-Electro-Mechanical Systems (MOEMS)
  (818 KB • PDF)
• Hybrid Silicon-On-Insulator Micromachining for Critical MEMS Components
  (100 KB • PDF)
• Microsystems: Size Really is Important
  (408 KB • MS Word)
• Optical Modulation of InP Diamond-Shaped Lasers
  (277 KB • PDF)